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VAS

Vacuum Alignment
System

Key Features

  • Reduce Tact-time by fast vacuum pumping
  • Advanced sticky chuck for upper glass hold
  • Reliability and technical support

Specification

  • Glass size : 2,200 X 2,500 mm
  • Align accuracy : <짹1럾
  • Max vacuum pressure : 0.13Pa
  • Vision resolution : 0.625럾
  • Tact time : ~ 100sec

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