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Evaporation Particle AOI

Evaporation
Particle AOI

主要特征

  • Using vision system to detect and classify the investigate defect in
    N2 Glove box after deposition process .
  • Optimized design at a minimum by particle (N2 Glove Box)

产品规格

Inspection Detection Range ≥ 1um (For Customer)
Size ~ Half 6G Glass(1,500 X 925)
Light Source LED, Metal Halide
Review Inspection Time ≤ 1.5sec./ Point (in N2 Glove Box)
Type Stand Alone

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