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Technology
Unrivaled expertise in large-area display dry etching equipment
INVENIA was the first Korean company to localize the dry etcher, one of the four core front-end systems in display manufacturing.
Plasma etching technology for large-area processes
Building on Korea’s first domestically developed dry etcher and proven G10.5 mass production, we have advanced large-area display etching technology. Our customized equipment designs use ECCP/ICP plasma and zone control technologies to support diverse LCD and OLED array process applications.
Large-Area Uniformity
Uniform coverage across extra-large substrates
Plasma delivery and zone control
Precise Plasma Control
Based on specialized RF equipment design
ECCP/ICP plasma control and fine circuit pattern etching
Modular Design
Designed for ease of maintenance
Modular architecture
Process Flexibility
From general LCD/OLED array etching
to advanced etching applications
R&D Achievements and Intellectual Property
INVENIA invests continuously in R&D to advance core technologies and strengthen its technological competitiveness.
- Patents on proprietary plasma equipment design technologies
- 56
- Patents on vacuum bonding, inspection and deposition equipment
- 15
Key R&D Projects
- Vision Board Development
- Equipped with camera image recognition and processing algorithms
- Dry Etcher Development (PE Type)
- Development of a proprietary large-area dry etcher model
- Atmospheric Plasma Electrode Development
- Replacing costly vacuum processes with low-cost, high-efficiency atmospheric processes
- Plasma Ion Implantation for Semiconductors
- Expansion into semiconductor equipment manufacturing
- Dual-Mode Dry Etcher Development
- Supporting diverse processes with fewer masks
- Molten Solder Bump Manufacturing Template
- Development of ultraprecise, low-vibration technology
- ICP Dry Etcher Development
- Securing domestic and overseas orders following LTPS equipment localization
- Photo Inline TFT Pattern Inspection System
- RTR module development and entry into the photo inline inspection market
- OLED Hot-Press Bonding Equipment Development
- Hot-press bonding equipment for OLED encapsulation
- LCD RTR Module Development for G8 and Above
- Core technology development for G8 and above LCD front-end process equipment
- M2 Ph1 G8 Hot-Press Bonding System
- Joint development of the M2 Ph1 G8 hot-press bonding system
- AMOLED GRAPHENE SHEET
- Joint research on new material processes for flexible displays
- Core Technology Development for G10 High-Density Plasma Dry Etching Equipment
- Development and commercialization of high-density plasma dry etching equipment; acquisition of G10 core process technologies
- G8 OLED Rechargeable Source Development
- Development of a G8 deposition system with rechargeable pixel materials
- Localization of the G10.5 ICP Dry Etcher
- Development of G10.5 inductively coupled plasma equipment