Vacuum Chamber
The core hub of display process logistics, maintaining a clean vacuum environment
By continuously maintaining an ultrahigh vacuum of approximately 5.0 × 10⁻⁵ Pa, the system prevents organic contamination during transfer, while a low-friction transfer drive minimizes fine particle generation. A modular interface connects adjacent vacuum chambers for seamless process integration.

Vacuum Chamber
- Customized vacuum chamber design from R&D to G10.5 large-area applications
- Vacuum: medium to high and ultrahigh vacuum ranges
- Materials: aluminum / stainless steel (SUS)

