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Vacuum Alignment System

Flawless bonding with ultraprecise large-area vacuum alignment solutions

High-precision guide and vision alignment systems enable micrometer-level alignment, while a pressure control mechanism prevents deformation and warping of large-area (G8.5) glass substrates. High-speed cell and panel bonding reduces total line takt time.

Vacuum Alignment System CAD image

VAS

  • Vision System (integrated UVW and vision)
  • Alignment Spec : ±1~20μm
  • Vacuum: 50 mTorr
  • Glass holding: supports ASC or ESC

Customized Solutions

INVENIA offers flexible process and design support tailored to each customer’s product characteristics and applications.
Drawing on expertise validated through customer technical evaluations, we support the core performance required in mass-production environments, providing tailored consulting to improve process efficiency and reliability.

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