MACRO
Inspection
Key Features
- By changing the angle of light incidence, operator can inspect
the macro defect or MURA defect - Using robot arm with glass chuck.
- Easy operation by manual joystick. (Glass & Light)
Specification
| Inspection Size | ~ 10G Glass(2,880 X 3,130) | |
|---|---|---|
| Optic | Reflection Light | Metal Halide, LED |
| Transmission Light | 3-Wavelength Fluorescent | |
| Stage | Mechanism | Dual Link Robot |
| Deg. Of Freedom | X, θX, θZ, J1, J2 | |
| Options | Steam, Review, Laser Indicator | |
